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Field of the Invention This invention relates to a photosensitive composition used in the production of a chemically amplified positive resist containing an acid generator as a necessary component, particularly to a photosensitive composition suitable for use in lithography using a far ultraviolet ray i-line or vacuum ultraviolet ray line as a light source.
A mass production process using a photolithography process is the typical one of fine processing techniques. In the mass production process, a negative photosensitive composition is generally used. Accordingly, it has been demanded to provide a positive photosensitive composition which is a direct positive type which does not require an etching process and in which the resolution is high.
Recently, a chemical amplification positive resist using as a positive photosensitive composition an alkaline-soluble material which generates an acid when irradiated with active radiation is disclosed, and has been proposed e.
This positive resist has a high resolution since the pattern formed is obtained by decomposing an alkali-soluble resin by the catalytic action of an acid generated by irradiation, and forming a pattern. In such a positive resist, an alkali-soluble resin is used as the base resin. A polyhydroxy styrene having a phenolic hydroxyl group substituted by a protecting group is known as the typical base resin.
In recent years, a polyhydroxystyrene having a tert-butyloxycarbonyloxy group as the substituent is studied as a base resin which gives a high resolution J. Khamoshiyan Movie Download In Hd p sadhart. Blog Comments. Blog Likes.